Comparative analysis of distributed mass micromachined gyroscopes fabricated in SCS-SOI and EFAB

نویسندگان

  • Alexander Trusov
  • Cenk Acar
  • Andrei M. Shkel
چکیده

This paper studies a design approach that yields robust vibratory MEMS gyroscopes. The design is based on multiple drive-mode resonators with incrementally spaced frequencies, distributed symmetrically around the center of a supporting frame. These resonators are structurally constrained in the tangential direction with respect to the supporting frame. In the presence of an angular rotation rate about the z-axis, a harmonic Coriolis force is induced on each proof mass. These force vectors lie in the tangential direction, generating a resultant torque on the supporting frame. The net Coriolis torque excites the supporting frame into torsional oscillation about the z-axis, which is capacitively detected to generate angular rate measurement. Two batches of prototypes have been fabricated using in-house single crystal silicon on insulator (SCS-SOI) bulk-micromachining and EFABTM process commercially available from Microfabrica. Wideband drive operation was demonstrated in SOI devices. EFAB process yielded 850 Hz devices with quality factor 250 in air (bandwidth 3 Hz) and 850 in vacuum. Increase of temperature from 25° to 125°C shifts the resonant frequency down by roughly bandwidth, while quality factor drops by 8%. Parasitics model associated with EFAB consists of only a lumped capacitor and is simpler than two-parametric parasitics circuit in SOI devices. Nonlinear parametric excitation of motion at resonant frequency by super-harmonic AC voltage was experimentally characterized. This actuation method provides high amplitude of motion and separates motion from parasitics in frequency domain. The actuation method can potentially further improve the bandwidth and gain characteristics of distributed mass gyroscope.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Distributed-Mass Micromachined Gyroscopes for Enhanced Mode-Decoupling

A novel micromachined z-axis gyroscope with multidirectional drive-mode is presented. The design concept aims to relax mode-matching requirement, eliminate effects of directional residual stresses, and completely decouple the drive and sense modes. The proposed approach is based on de ning multiple drive-mode oscillators, distributed symmetrically around the center of a supporting frame. Quadra...

متن کامل

Fabrication of Micro Gyroscope on the SOI Substrate with Enhanced Sensitivity for Detecting Vertical Motion

Reactive ion etching lag is used to fabricate capacitance sensor to detect vertical movement in a gyroscope. Aspect ratio of each trenches are controlled by inlet opening width. In comparison to present gap closing-type sensors, the sensor structure fabricated with RIE lag on silicon on insulator wafer shows bigger sensitivity. INTRODUCTION Micromachined gyroscopes for measuring the rate and/or...

متن کامل

The Development of Micromachined Gyroscope Structure and Circuitry Technology

This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface...

متن کامل

Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures

Single crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in both electrical and mechanical properties. To survive at the elevated temperature, the silicon structures must work in combination with other advanced...

متن کامل

Micromachined Fluid Inertial Sensors

Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly includes thermal accelerometers and fluid gyroscopes, which have now been developed since the end of the last century for about 20 years. Compared with conventional silicon or quartz inertial sensors, the fluid inertial sensors use a fluid instead of a solid proof mass as the moving and sensitive eleme...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2006